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Triple-Mesa InGaAs/InAlAs Single-Photon Avalanche Diode Array for 1550 nm Photon Detection

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Abstract

We present a novel InGaAs/InAlAs single-photon avalanche diodes array with a triple- mesa structure. High photon detection efficiency of 36% with decent dark count rate of 1.9×107 Hz is achieved at 240 K.

© 2021 The Author(s)

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