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Conferences > CLEO_SI > 2021 > SM1G > SM1G.2

High-precision and large-dynamic-range three-dimensional surface profilometry by comb-based time-of-flight detection

Yongjin Na, Changmin Ahn, Chan-Gi Jeon, and Jungwon Kim

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Abstract

We demonstrate high-precision (~10-nm repeatability) and large-dynamic-range (120 dB dynamic-range with ~9-mm ambiguity range) three-dimensional surface profile imaging technique by combining an optical frequency comb, an electro-optic-sampling-based timing detector, and a fast beam scanner.

© 2021 The Author(s)

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