Abstract
We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.
© 2021 The Author(s)
PDF ArticleMore Like This
Yue Wang, Akifumi Asahara, Ken-ichi Kondo, and Kaoru Minoshima
W4F.7 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2018
J. Zhang, Z. H. Lu, and L. J. Wang
CMY3 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006
Kana Alyssa Sumihara, Sho Okubo, Makoto Okano, Hajime Inaba, and Shinichi Watanabe
FW2E.7 Fourier Transform Spectroscopy (FTS) 2016