Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Ultra-Precise Complex Refractive Index Measurement Using Dual-Comb Spectroscopy

Not Accessible

Your library or personal account may give you access

Abstract

We determined complex refractive index and thickness of a silicon wafer with unprecedented precision using dual-comb spectroscopy. The standard deviations of the refractive index and the thickness are 8.9×10-6 and 1.0 nm, respectively.

© 2021 The Author(s)

PDF Article
More Like This
Spatially scanning dual-comb spectroscopy for precise measurement of refractive index and thickness profiles of solids

Yue Wang, Akifumi Asahara, Ken-ichi Kondo, and Kaoru Minoshima
W4F.7 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2018

Application of Frequency Combs for Precision Measurement of Refractive Index of Air

J. Zhang, Z. H. Lu, and L. J. Wang
CMY3 Conference on Lasers and Electro-Optics (CLEO:S&I) 2006

Development of precise polarization measurement system using dual-comb spectroscopy

Kana Alyssa Sumihara, Sho Okubo, Makoto Okano, Hajime Inaba, and Shinichi Watanabe
FW2E.7 Fourier Transform Spectroscopy (FTS) 2016

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved