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Conferences > CLEO_SI > 2021 > SM3B > SM3B.6

Internal structuring of silicon with multi-timescale irradiations

Amlan Das, Andong Wang, Olivier Utéza, and David Grojo

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Abstract

By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.

© 2021 The Author(s)

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