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Conferences > CLEO_SI > 2021 > SM3D > SM3D.2

Printing Grayscale Optical Metasurface at Sub-10-nm-resolution via Light-controlled Capillary Force Lithography

Myung Gi Ji, Qiang Li, and Jaeyoun Kim

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Abstract

By applying optical control to nanoscale capillary effect, we realize grayscale printing of polymer nanopixels with a sub-10-nm vertical resolution. Through spatial modulation of the control-light, we print various grayscale optical metasurfaces on-demand.

© 2021 The Author(s)

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