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Monolithically Integrated Electronic-Photonic Ultrasound Receiver Using Microring Resonator

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Abstract

The first optical ultrasound sensor with co-integrated read-out circuitry is presented. Based on a micro-ring resonator (MRR), it has a measured 7.3mV/kPa sensitivity, 480Pa minimum detectable pressure, operating at 80% fractional bandwidth around 5MHz.

© 2021 The Author(s)

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