Versatile micro-fabricated mirrors with finesse &gt;700,000

James P. Hendrie; James P. Hendrie; Naijun Jin; Charles A. McLemore; Charles A. McLemore; Yizhi Luo; Megan Kelleher; Megan Kelleher; David Mason; Prashanta Kharel; Franklyn Quinlan; Franklyn Quinlan; Peter Rakich; Scott A. Diddams; Scott A. Diddams

doi:10.1364/CLEO_SI.2021.STh4J.2

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2021),
paper STh4J.2
•https://doi.org/10.1364/CLEO_SI.2021.STh4J.2

Versatile micro-fabricated mirrors with finesse >700,000

James P. Hendrie, Naijun Jin, Charles A. McLemore, Yizhi Luo, Megan Kelleher, David Mason, Prashanta Kharel, Franklyn Quinlan, Peter Rakich, and Scott A. Diddams

CLEO: Science and Innovations 2021

San Jose, California United States
9–14 May 2021
ISBN: 978-1-943580-91-0

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Novel Fabrication and Characterization (STh4J)

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J. P. Hendrie, N. Jin, C. A. McLemore, Y. Luo, M. Kelleher, D. Mason, P. Kharel, F. Quinlan, P. Rakich, and S. A. Diddams, "Versatile micro-fabricated mirrors with finesse >700,000," in Conference on Lasers and Electro-Optics, J. Kang, S. Tomasulo, I. Ilev, D. Müller, N. Litchinitser, S. Polyakov, V. Podolskiy, J. Nunn, C. Dorrer, T. Fortier, Q. Gan, and C. Saraceno, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper STh4J.2.

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Abstract

We introduce a micro-fabrication technique for high-finesse optical mirrors based on reflow and smooth reactive ion etch. These mirrors support >700,000 finesse with surface losses constrained to ~1.2 ppm.

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