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Silicon photonic MEMS phase shifter with μs time constant built on a foundry platform

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Abstract

MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2π phase shifter with a 1.54 μs time constant and 0.5 dB insertion loss in IMEC’s iSiPP50G platform.

© 2021 The Author(s)

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