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Conferences > CLEO_SI > 2022 > SF4M > SF4M.4

Slotted Silicon Microring Resonator Gated by Transparent Conducting Oxide Capacitor

Wei-Che Hsu, Benjamin Kupp, Cade Trotter, Nabila Nujhat, John F. Conley, and Alan X. Wang

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Abstract

We demonstrated a slotted silicon microring resonator with the waveguide gap filled by high mobility titanium-doped indium oxide (ITiO) MOS capacitor. It experimentally achieved an extremely large electro-optic wavelength tunability of 540 pm/V.

© 2022 The Author(s)

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