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Conferences > CLEO_SI > 2022 > SM3N > SM3N.1

In-situ photonic circuit field characterization in electronics-photonics CMOS platform via backside flip-chip near-field scanning optical microscopy

Kenaish Al Qubaisi, Mark Schiller, Bohan Zhang, Deniz Onural, Anatol Khilo, Michael J. Naughton, and Miloš A. Popović

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Abstract

We demonstrate device field c haracterization u sing N SOM c ollection a nd in-teraction measurement modes via the backside buried-oxide of large scale photonic circuits fabricated in monolithic electronics-photonics CMOS platforms (here a microdisk resonator) post-processed using flip-chip substrate-removal.

© 2022 The Author(s)

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