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Shaping Free-space Emission with Monolithically Integrated Metalenses on Silicon Photonic Waveguides

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Abstract

We report a monolithic and CMOS-compatible platform to integrate metalenses on silicon waveguides for shaping free-space emission. We demonstrate experimentally a 2.5 μm tightly focused spot, and the focus position is switchable with excitation direction.

© 2022 The Author(s)

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