Low Temperature Heterogeneous Integration of Structured III-V Semiconductors for Quantum Optics Applications

Albert Peralta Amores; Marcin Swillo

doi:10.1364/CLEO_SI.2022.STh2O.6

Abstract

Heterogeneous integration of 250 nm thick and 1 mm long InGaP waveguides on SiO2 via native oxide molecular bonding for counter-directional spontaneous photon-pair generation at 1550 nm and 1300 nm with 50 nm tunability is demonstrated.

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