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Conferences > CLEO_SI > 2022 > STh5F > STh5F.5

Aluminum Nitride Slot-mode Piezo-Optomechanical Crystals

Sumi Radhakrishnan, Trisha Chakraborty, Thomas E. Murphy, and Karen E. Grutter

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Abstract

We demonstrate an AlN piezo-opto-mechanical slot-mode resonator excited using a radio-frequency electrode hovering above the chip, with a 1550-nm optical mode coupling to multiple mechanical modes over broad frequency span (4.5 MHz - 3.8 GHz).

© 2022 The Author(s)

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