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Conferences > CLEO_SI > 2022 > STu5G > STu5G.5

Heterogeneous integration of AlGaAs/GaAs photodiodes on tantala waveguides for visible-light applications

Masoud Jafari, Tasneem Fatema, David R. Carlson, Scott B. Papp, and Andreas Beling

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Abstract

For the first time we demonstrate heterogeneously integrated photodiodes on tantalum pentoxide (Ta2O5, or tantala) for visible light detection. The photodiodes have 20 pA dark current, 0.115 A/W responsivity at 635 nm wavelength, and a projected >12 GHz RC-limited bandwidth.

© 2022 The Author(s)

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