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High-efficiency Mid-Infrared InGaAs/InP Arrayed Waveguide Gratings

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Abstract

We report the fabrication of InGaAs/InP based arrayed waveguide gratings featuring low insertion loss and non-uniformity. This device can be integrated monolithically with on-chip III-V lasers to make compact high-power mid-infrared sources.

© 2023 The Author(s)

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