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Conferences > CLEO_SI > 2023 > SF3E > SF3E.5

Integration of Phase Change Material with Commercial 45nm Monolithic Silicon Photonics

Changming Wu, Daniel Sturm, Uthkarsh Adya, Mo Li, and Sajjad Moazeni

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Abstract

State-of-the-art commercial silicon photonics can be transformed by adding non-volatile optical reconfigurability, which can be enabled using phase change materials (PCM). We present the first-ever integration of PCM with a commercial-foundry 45nm monolithic silicon photonic process.

© 2023 The Author(s)

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