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Conferences > CLEO_SI > 2023 > SF3K > SF3K.6

Silicon Nitride based photonic integrated circuit technology and integration opportunities

Shankar Kumar Selvaraja, Avijit Chatterjee, Gali Sushma, Pravin Rawat, Venkatachalam P, Radhakant Singh, and Neethu E V

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Abstract

We present our work on silicon nitride(SiN) integrated devices and circuit development operating in the visible-to-infrared spectrum. Integration of SiN-on-SOI will be discussed along with Challenges and opportunities related to material and device integration.

© 2023 The Author(s)

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