High-Q thin film lithium niobate microrings fabricated with wet etching

Rongjin Zhuang; Jinze He; Haifeng Hu; Yifan Qi; Lihua Xu; Weiguo Chu; Yang Li

doi:10.1364/CLEO_SI.2023.SM2H.1

CLEO 2023
Technical Digest Series (Optica Publishing Group, 2023),
paper SM2H.1
•https://doi.org/10.1364/CLEO_SI.2023.SM2H.1

High-Q thin film lithium niobate microrings fabricated with wet etching

Rongjin Zhuang, Jinze He, Haifeng Hu, Yifan Qi, Lihua Xu, Weiguo Chu, and Yang Li

CLEO: Science and Innovations 2023

San Jose, CA United States
7–12 May 2023
ISBN: 978-1-957171-25-8

From the session
Fiber Optics and Glass Material (SM2H)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
R. Zhuang, J. He, H. Hu, Y. Qi, L. Xu, W. Chu, and Y. Li, "High-Q thin film lithium niobate microrings fabricated with wet etching," in CLEO 2023, Technical Digest Series (Optica Publishing Group, 2023), paper SM2H.1.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

Using wet etching method, we realized microrings with intrinsic quality factor over 1.19 × 10⁷ based on thin film lithium niobate on insulator. This method features low cost, high throughput and high reproducibility.

PDF Article

More Like This

Integrated Lithium-Niobate Nonlinear Photonics Enabled by Wet-Etching Technology

Wenbo Mao, Di Jia, Kashif M. Awan, Fu Li, and Lan Yang
JM4A.56 Frontiers in Optics (FiO) 2023

Wavelength conversion with a high-Q thin-film lithiun niobate microring resonator

Fabien Labbe, Siyan Zhou, Alif Laila Muthali, and Yunhong Ding
JW2A.30 CLEO: Applications and Technology (CLEO:A&T) 2023

Ultrahigh-Q Lithium Niobate Microring Resonator

Mian Zhang, Cheng Wang, Rebecca Cheng, Amirhassan Shams-Ansari, and Marko Loncar
SF2I.3 CLEO: Science and Innovations (CLEO:S&I) 2018

Previous Article Next Article