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Conferences > CLEO_SI > 2023 > SM2H > SM2H.5

Propagation Losses of Sputtered Oxide Waveguides in the Visible Range

David A. Irvine, Neil MacFarlane, Aaron Schreyer-Miller, William D. Houck, Mark A. Foster, and Amy C. Foster

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Abstract

Sputtered oxide films show an exciting future with photonic integrated circuits due to their wide transparency range. We show propagation losses in niobium-tantalum oxide (NbTaOx) and tantalum pentoxide (Ta2O5) with visible wavelengths in fabricated waveguides.

© 2023 The Author(s)

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