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Conferences > CLEO_SI > 2023 > STh1N > STh1N.3

Ionic Liquid-assisted Cavitation for Ultrafast Laser Micromachining

Brian K. Canfield, John N. Allman, Alexander Terekhov, Trevor M. Moeller, and Lino Costa

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Abstract

We study the effects of cavitation-assisted ultrafast laser micromachining under ionic liquids, rather than traditional water immersion. Ionic liquids may serve to localize damage more precisely because their low vapor pressures inhibit cavitation.

© 2023 The Author(s)

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