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Conferences > CLEO_SI > 2023 > SW3L > SW3L.1

High-density lithium niobate integrated photonics

Zihan Li, Rui N. Wang, Grigory Lihachev, Mikhail Churaev, Anat Siddharth, Johann Riemensberger, and Tobias J. Kippenberg

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Abstract

We demonstrate a strip waveguide-based LiNbO3 photonic integrated circuit fabricated with a novel hard mask, diamond-like-carbon (DLC). The steep sidewall configuration exhibits tight optical confinement and dispersion control while preserving ultra-low loss of < 4 dB/m. In the meantime, a low noise self-injection locked laser is achieved with our chips.

© 2023 The Author(s)

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