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High Numerical Aperture Reflection Mode Coherent Diffractive Imaging of Nano-Patterned Surfaces using a Tabletop Extreme Ultraviolet Source

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Abstract

Using an extreme-ultraviolet tabletop diffraction microscope, we demonstrate unprecedented resolution by imaging structures in an extended reflection mode. Titanium nano-patterns are reconstructed with a 40nm transverse resolution; surface variations are imaged with sub-nanometer axial resolution.

© 2015 Optical Society of America

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More Like This
High fidelity, general reflection-mode coherent diffractive imaging with a tabletop EUV source

Daniel E. Adams, Bosheng Zhang, Matthew D. Seaberg, Dennis F. Gardner, Elisabeth R. Shanblatt, Margaret M. Murnane, and Henry C. Kapteyn
STh3O.1 CLEO: Science and Innovations (CLEO_SI) 2014

Tabletop Extreme Ultraviolet Reflection Mode Coherent Diffractive Imaging of Buried Structures

Giulia F. Mancini, Dennis F. Gardner, Elisabeth R. Shanblatt, Christina L. Porter, Michael Tanksalvala, Robert Karl, Charles Bevis, Henry Kapteyn, Margaret Murnane, and Daniel E. Adams
ET4A.2 Compact EUV & X-ray Light Sources (EUVXRAY) 2016

Tabletop Nanometer Extreme Ultraviolet Imaging in an Extended Reflection Geometery

Daniel E. Adams, Bosheng Zhang, Matthew D. Seaberg, Dennis F. Gardner, Elisabeth R. Shanblatt, Margaret M. Murnane, and Henry C. Kapteyn
LW1H.4 Laser Science (LS) 2014

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