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Conferences > COSI > 2016 > JW4A > JW4A.53

Holographic method of topography measurement based on interference of spherical reference and quasi – spherical object beams

Marta Mikuła, Tomasz Kozacki, Michał Józwik, and Julianna Kostencka

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Abstract

This work presents a holographic measurement method based on interference of two spherical waves. It is devoted to numerical and experimental analysis of the influence of misalignment of imaging and illuminating planes on the accuracy of topography reconstruction of high NA objects.

© 2016 Optical Society of America

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