Abstract

The interiors of integrated circuits (ICs) are imaged by X-ray translational scanning ptychography as the sole acquisition method of raw data. This is unlike ptycho- tomographic and ptycho-laminographic schemes, which also require the angle of illumi- nation to be scanned. The computational reconstruction is reconstructed by a Transformer, a form of machine learning algorithm also used in dynamical image processing. During training, the Transformer learns the rich priors that define the IC interior. Even though 3D reconstructions obtained from experimental raw data are not error-free, the technique shows promise toward drastically reducing the overall scanning time.

© 2021 The Author(s)