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Conferences > COSI > 2023 > CW4D > CW4D.7

Wafer inspection through reflection mode super-resolution topography

Hojun Lee, Jangwoon Sung, Seungbeom Park, Junho Shin, Hyungjin Kim, Wookrae Kim, and Myungjun Lee

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Abstract

We propose an innovative lens-less imaging system for wafer surface inspection using speckle illumination in reflection mode. Our proposed system provides 3D imaging capability while enhancing both the resolution and the field-of-view.

© 2023 The Author(s)

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