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Conferences > CPS > 1997 > CSuA > CSuA.1

The Nanofabrication Challenges in Realizing Quantum Effect Integrated Circuits

T. P. E. Broekaert, J. N. Randall, E. A. Beam, G. A. Frazier, D. Jovanovic, A. C. Seabaugh, and B. D. Smith

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Abstract

Lateral heterostructure resonant tunneling transistors have the potential to become the fundamental device technology for ultra-scaled integrated circuits. Manufacturing these circuits will require near atomic scale precision.

© 1997 Optical Society of America

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