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Deflectometry Challenges Interferometry: 3D-Metrology from Nanometer to Meter

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Abstract

We will discuss deflectometry from the physicist’s and from the information theoretical point of view. The intrinsic features of deflectometry—incoherence, source encoding, high dynamical range, simplicity, and scalability—enable new sensors and unexpected applications. We will demonstrate that deflectometry is a novel imaging principle with a wide spectrum of new applications. The local slope of specularly reflecting surfaces can be measured for objects from µm-size to meter-size. With simple means, it is possible to find shallow (nm-) grooves or defects and to generate SEM-like images with high dynamical range. Microdeflectometry in transmission supplies extremely sensitive quantitative “phase contrast”. Macroscopic deflectometry in transmission allows us to measure local refractive power with an accuracy better than 1 mD.

© 2009 Optical Society of America

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