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Conferences > DH > 2013 > DTu2A > DTu2A.6

Topography Measurement of High Numerical Aperture Microlenses with Digital Holographic Microscopy

Tomasz Kozacki, Kamil Liżewski, Julianna Kostencka, and Michał Józwik

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Abstract

This work focuses on the topography measurement of high NA microlenses using digital holography (DH) in microscopic setup. The necessary modifications are discussed to provide DH with capability of accurate characterization microlens of high NA.

© 2013 Optical Society of America

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