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Conferences > DH > 2013 > DW2A > DW2A.3

Holographic Lithography on Vertical Surfaces

J. J. Toriz-Garcia, J. J. Cowling, G. L. Williams, A. Purvis, R. McWilliam, F. B. Soulard, N. L. Seed, P. A. Ivey, and D. Claus

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Abstract

Holograms of 3D images are combined with noise suppression and off-axis projection to image arbitrary patterns onto a vertically oriented plane. This has important applications in microfabrication, for instance writing on the edges of silicon chips.

© 2013 Optical Society of America

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