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Conferences > DH > 2014 > DTh3B > DTh3B.8

Full-field Angle-deviation Optical Microscope with Reflectivity-Height Transformation

Ming-Hung Chiu, Chen-Tai Tan, Ming-Hung Tsai, and Ya-Hsin Yang

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Abstract

This full-field three-dimensional (3D) optical microscope is based on the reflectivity-height transformation. Using a parallelogram prism and two CCDs to detect the reflectivity at the critical angle nearby can achieve the angle deviation and surface height.

© 2014 Optical Society of America

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