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Conferences > DH > 2014 > DTh4B > DTh4B.1

Size measurement of nanostructure using digital super-resolution interference microscopy

Shinji Ishikawa and Yoshio Hayasaki

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Abstract

We demonstrate a super-resolved imaging based on a complex-amplitude pattern matching method. The accuracy in a size measurement of a nanostructured object is estimated by a computer simulation.

© 2014 Optical Society of America

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