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Conferences > DH > 2019 > W4B > W4B.4

XUV coherence tomography with nanoscale resolution using one-dimensional phase retrieval

Silvio Fuchs, Martin Wünsche, Jan Nathanael, Johann J. Abel, Julius Reinhard, Felix Wiesner, Slawomir Skruszewicz, Christian Rödel, and Gerhard G. Paulus

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Abstract

We present XUV Coherence Tomography (XCT) driven by a high-harmonic generation (HHG) light source. Using a novel one-dimensional phase retrieval algorithm, XCT enables non-destructive, artifact-free, nanoscale, cross-sectional imaging, of, e.g., semiconductor devices.

© 2019 The Author(s)

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