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Conferences > DH > 2022 > W5A > W5A.20

Scatterometry of isolated resist pattern by soft X-rays using deep-learning analysis

Tetsuya Hoshino, Sadao Aoki, Masahide Itoh, Motoharu Shichiri, and Hiroshi Itoh

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Abstract

When the scattering or absorption is large, the 3D resolution is about 100 wavelengths in holography, but the combination of scatterometry, imaging, and deep learning is a general-purpose method with a resolution of about wavelength.

© 2022 The Author(s)

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