Abstract

Diffraction gratings are of wide interest in integrated planar micro-optics to provide beamsplitting, multi-beam generation, beam deflection, beam focussing, and anti-reflection properties. Applications for integrated planar microoptics include; imaging¹, clock distribution², computing and switching systems. By using lithographic and etching techniques, multiple micro-optic elements can be integrated on a single substrate with submicron positioning accuracy. By using through wafer alignment, elements can be positioned on the substrates top and bottom surfaces. This allows the signal to travel within the substrate, in a zig-zag fashion, from one element to the next (see fig. 1). This approach is attractive because it provides a stable compact system compared to discrete bulk optics.

© 1992 Optical Society of America