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Fabrication of continuous-relief micro-optics: progress in laser writing and replication technology

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Abstract

Laser writing technology for the fabrication of continuous-relief micro-optical elements is being developed at a number of institutes worldwide [1,2]. It represents a very powerful and flexible fabrication technique and fits well to replication technology in which the resist surface-relief microstructure can be electroformed and replicated into plastic material. Fig. 1 illustrates the essential production steps involved.

© 1996 Optical Society of America

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