Abstract
Diffractive optical elements (DOEs) are realized either as continuous surface-relief microstructures (e.g. by direct-write electron beam lithography or direct laser writing) or as binary or multilevel reliefs (mostly using semiconductor fabrication technology). In general, the optical performance (especially efficiency) of continuous-reliefs is superior to that of their binary counterparts. One very important feature of DOEs is their ability to be replicated using techniques such as embossing, casting or molding1. Although the manufacture cost of one original DOE is relatively high, the piecewise cost is dramatically reduced when large series of one specific DOE is wanted (e.g. in telecommunication). A method particularly well suited for massproduction of DOEs is injection molding2,3. We will describe the process of replicating continuous-relief DOEs by conventional CD injection molding, report on successfully replicated DOEs and discuss the fidelity of the process.
© 1996 Optical Society of America
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