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Conferences > DOMO > 1996 > JMC > JMC.5

Diffractive diffusers at the fabrication limit

Hans Peter Herzig, Wolfgang Singer, Eckhard Piper, and Johannes Wangler

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Abstract

Diffractive micro-optical elements gained increasing interest for beam-shaping, e.g., the laser treatment of materials,1 and for illumination systems. The fabrication technologies for diffractive micro-optical elements bring in advance high accuracy and reproducibility, especially of the periodicity of the elements. In monochromatic applications, diffractive micro-optical elements are only restricted by the limits of the fabrication technology.

© 1996 Optical Society of America

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