Abstract
We report on the application of the emerging micromachining technology for fabrication of micro-optics as well as its integration with microactuators for adaptive control and dynamic alignment.
© 1998 Optical Society of America
PDF ArticleMore Like This
Micromachined three-dimensional microgratings for free-space integrated micro-optics
S. S. Lee, L. Y. Lin, and M. C. Wu
ThB5 Optical Fiber Communication Conference (OFC) 1995
Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics
Qi-Dai Chen, Hong Xia, Yong-Lai Zhang, and Hong-Bo Sun
CM6_3 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011
Correction of beam profiles of semiconductor laser by free-space surface-micromachined micro-optics
J. L. Shen, L. Y. Lin, L. Fan, S. S. Lee, and M. C. Wu
CThD4 Conference on Lasers and Electro-Optics (CLEO:S&I) 1997