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New Convex Grating Types Manufactured by Electron Beam Lithography

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Abstract

The advantages of spectrometer forms utilizing concentric surfaces have been recognized for some time.1,2 In order to realize these advantages in practice, a reliable and flexible method of generating gratings on curved substrates is needed. Concave gratings are commonly manufactured using both ruling and holographic techniques. However, it is difficult to produce well-blazed curved gratings.3,4,5 These difficulties are exacerbated in concentric spectrometer designs in which the grating must typically cover an arc that is greater than the blaze angle itself.

© 1998 Optical Society of America

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