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Low NA fused silica refractive microlenses for Shack-Hartmann wavefront sensor

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Abstract

Refractive microlenses with numerical apertures down to 0.02 have been fabricated in fused silica by using low selectivity etching. The low NA microlenses will been integrated into a Shack-Hartmann wavefront sensor and tested

© 2000 Optical Society of America

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