Abstract
Fabrication of refractive microlenses, blazed gratings and diffractive Fresnel lenses in diamond is demonstrated. In the fabrication process we have used photolithography, electron-beam lithography and plasma etching. The micro-optical elements have been optically evaluated.
© 2002 Optical Society of America
PDF ArticleMore Like This
Nathanaël Restori, Adrien Toros, Toralf Scharf, and Niels Quack
73 Diamond Photonics - Physics, Technologies and Applications (DP) 2019
Margit Ferstl
DTuD.21 Diffractive Optics and Micro-Optics (DOMO) 1998
Chii-Chang Chen, Ming-Hung Li, Chih-Yang Chang, Gou-Chung Chi, Jenq-Yang Chang, Wei-Tai Cheng, Jui-Hung Yeh, and Chuck Wu
DMB3 Diffractive Optics and Micro-Optics (DOMO) 2002