Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Fabrication and applications of subwavelength gratings

Not Accessible

Your library or personal account may give you access

Abstract

We have developed several kinds of diffractive optical elements with submicron structures. This paper describes the optical elements, such as antireflection structured surface, a high efficiency computer generated hologram, blazed grating with subwavelength structure and so on. A key technology of fabrication of them is a high-density plasma etching. The profiles of subwavelength structures are controlled by etching conditions.

© 2002 Optical Society of America

PDF Article
More Like This
Applications and fabrication of subwavelength gratings

Marc Schnieper, Michael T. Gale, Christian Zschokke, and Christian David
DThA3 Diffractive Optics and Micro-Optics (DOMO) 2002

Fabrication of refractive and diffractive micro-optical structures in diamond

Mikael Karlsson and Fredrik Nikolajeff
DMB2 Diffractive Optics and Micro-Optics (DOMO) 2002

Monolithically Fabricated Subwavelength Grating Filters for O-band MUX/DEMUX Applications

Francis O. Afzal, Bo Peng, Shuren Hu, Kevin Dezfulian, Karen Nummy, Andy Stricker, Abdelsalam Aboketaf, Crystal Hedges, Dave Riggs, Ken Giewont, and Sharon M. Weiss
SM4J.2 CLEO: Science and Innovations (CLEO:S&I) 2020

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved