Diffractive beam shaping for partially coherent UV-laser beams

Dirk Schäfer; Jürgen Ihlemann; Frank Simon

doi:10.1364/DOMO.2002.DTuD9

Diffractive Optics and Micro-Optics
OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002),
paper DTuD9
•https://doi.org/10.1364/DOMO.2002.DTuD9

Diffractive beam shaping for partially coherent UV-laser beams

Dirk Schäfer, Jürgen Ihlemann, and Frank Simon

Diffractive Optics and Micro-Optics 2002

Tucson, Arizona United States
3–6 June 2002
ISBN: 1-55752-710-5

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Poster Session and Beauty Contest (DTuD)

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D. Schäfer, J. Ihlemann, and F. Simon, "Diffractive beam shaping for partially coherent UV-laser beams," in Diffractive Optics and Micro-Optics, R. Magnusson, ed., Vol. 75 of OSA Trends in Optics and Photonics Series (Optica Publishing Group, 2002), paper DTuD9.

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Abstract

Based on a recently developed design algorithm a multifaceted diffractive phase element (DPE) has been realized for an excimer laser beam shaping application. The optical reconstruction is presented and the influence of corrections concerning wavefront distortion and coherence is demonstrated.

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