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Conferences > DOMO > 2004 > DTuC > DTuC3
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (Optica Publishing Group, 2004),
  • paper DTuC3
  • •https://doi.org/10.1364/DOMO.2004.DTuC3

High-frequent structures generated by interference lithography in the DUV

Michael Helgert, Matthias Burkhardt, Klaus Rudolf, Reinhard Steiner, and Robert Brunner

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Abstract

We demonstrate the potential of interference lithography in the DUV by examples of two-dimensional patterns that have been obtained by multiple exposure techniques. Using immersion prisms we realized gratings with more than 10 000 lines/mm.

© 2004 Optical Society of America

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