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Conferences > DP > 2019 > NANO > 116
  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 116
  • •https://doi.org/10.1364/DP.2019.116

Characterization of Crystallographically Etched Single Crystal Diamond Gratings

Marcell Kiss, Teodoro Graziosi, Adrien Toros, Toralf Scharf, Christian Santschi, Olivier J.F. Martin, and Niels Quack

Open Access Open Access

Abstract

We demonstrate Single Crystal Diamond diffraction gratings fabricated by crystallographic diamond etching. Gratings with triangular, trapezoidal and rectangular groove profiles were fabricated and investigated in detail using scanning electron microscopy, atomic force microscopy and optical measurement to quantify the groove shape, sidewall roughness and diffraction efficiency.

© 2019 The Author(s)

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