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Conferences > DP > 2019 > NANO > 123
  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 123
  • •https://doi.org/10.1364/DP.2019.123

Micro- and Nanomachining of Diamond

P. Gluche, M. Mertens, and H.-J. Fecht

Open Access Open Access

Abstract

Due to its outstanding material properties diamond is considered for many optical, mechanical, electrical and thermal applications. Until now, however, the high manufacturing cost has prevented its widespread industrial use. This contribution is therefore focused on cost efficient industrial scaled diamond micro- and nanomachining processes.

© 2019 The Author(s)

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