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Conferences > DP > 2019 > POS1 > 124
  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 124
  • •https://doi.org/10.1364/DP.2019.124

Fabrication of High Reflection Gratings in Single Crystal Diamond by Reactive Ion Etching

Gergely Huszka, Mehdi Naamoun, and Niels Quack

Open Access Open Access

Abstract

We demonstrate the design and fabrication of diffraction gratings in single crystal diamond substrates by metal mask deposition onto the diamond surface, e-beam lithography and ion beam etching for pattern transfer, and reactive ion etching.

© 2019 The Author(s)

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