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  • Symposium Latsis 2019 on Diamond Photonics - Physics, Technologies and Applications
  • OSA Technical Digest (Optica Publishing Group, 2019),
  • paper 90
  • https://doi.org/10.1364/DP.2019.90

On-chip diamond integrated photonic devices

Open Access Open Access

Abstract

Single crystal diamond membranes with thicknesses <250nm and diameters of 2 mm are fabricated via deep-etching. The grating couplers and waveguides are integrated on chip of the diamond membrane. The membrane has an overall RMS roughness of <1nm. The diamond chip aims for applications in quantum metrology and quantum computation.

© 2019 The Author(s)

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