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Submicron structures formation at initially polished and roughened silicon surface irradiated by nanosecond laser pulses in distilled water

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Abstract

Initially polished and rough silicon were irradiated by nanosecond laser beam in distilled water. Analysis of SEM images and reflectivity results show that the structures density and reflectivity of silicon are influenced by laser pulse number and target characteristics.

© 2012 Optical Society of America

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