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Conferences > ECBO > 2007 > OSTII > 6627_69

Differential-phase optical coherence reflectometer for surface profile measurement

Huan-Jang Huang, Wen-Chuan Kuo, Sheng-Yi Chang, Chien-Wa Ho, and Chien Chou

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Abstract

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel reflectometer is discussed.

© 2007 SPIE

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